IMETU, the Institute of Microelectronics of Tsinghua University,was founded in September 1980 with the approval of the Ministry of Education of China. IMETU is located on the beautiful campus of Tsinghua University. The total property size of IMETU is about 10,000 square meters. IMETU has played an important role at Northern China Base of Microelectronics Research and Development which is greatly supported by the government. The researches at IMETU are mainly focused on micro-nano electronics, IC design and development, processing techniques. IMETU owns most advanced IC design environments and semiconductor processing laboratory. It is a part of China National Information Science Laboratory.