Jan 20 2008
Akrion, Inc., a supplier of semiconductor surface preparation equipment, announced today that its GAMA system has been qualified for an advanced solar cleaning application.
The cleaning process was recently developed by a manufacturer of solar cells on a GAMA automated wet station. James S. Molinaro, Akrion president and CEO said, "Adding solar cleaning capability demonstrates the versatility of our GAMA Series. This is another example of the superior flexibility of the platform."
GAMA handles a wide variety of surface preparation applications on silicon wafers for IC devices and MEMS, photomasks and flat panel displays, as well as this newly developed process for solar manufacturers. The modular GAMA batch-immersion platform has undergone continuous improvements. It is available in many configurations for varied etching, cleaning and stripping applications. The platform includes many Akrion innovations such as megasonics, in situ processing, ICE-1™ chemical concentration control, and ozonated DI water processing.